Hydrodynamic Performance of Gas Microbearings
نویسندگان
چکیده
Hydrodynamic performance of gas microbearings, fabricated with deep X-ray lithography and electroplating, will be presented in this article. Static performance in terms of load parameters and attitude angles was calculated using Molecular Gas Lubrication (MGL) theory. Threshold speed and allowable rotor mass were calculated to investigate safe operating conditions of the fabricated gas microbearings using orbit simulation. Finally, improved bearing designs were proposed to increase stability. @DOI: 10.1115/1.1792676#
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